A Practical Guide to Optical Metrology for Thin Films by Michael Quinten PDF

By Michael Quinten

A one-stop, concise consultant on identifying and measuring skinny movie thickness by means of optical methods.

This functional e-book covers the legislation of electromagnetic radiation and interplay of sunshine with subject, in addition to the idea and perform of thickness dimension, and smooth functions. In so doing, it exhibits the features and possibilities of optical thickness decision and discusses the strengths and weaknesses of dimension units besides their overview methods.

Following an advent to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in house and topic. the most subject of this publication, the choice of the thickness of a layer in a layer stack through measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. ultimately, in bankruptcy 7, the writer discusses numerous business purposes of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at business and educational researchers, engineers, builders and brands inquisitive about all components of optical layer and skinny optical movie dimension and metrology, strategy regulate, real-time tracking, and applications.

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A Practical Guide to Optical Metrology for Thin Films by Michael Quinten


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